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HOME > Research Introduction > Nanoscience and Nanotechnology Center > Department of Advanced Nanofabrication

Department of Advanced Nanofabrication

Staff

  • Photo
    Prof.
    Y. YOSHIDA
  • Photo
    Assoc. Prof.
    J. YANG
  • Photo
    Assis. Prof.
    T. KONDO
  • Photo
    Assis. Prof.
    K. KAN
  • Photo
    Specially Appointed Prof.
    S. TAGAWA

Content of research

Our research target is fundamental physicochemical processes induced by electron beam irradiation to materials for the sake of realizing an advanced nanofabrication. To reveal the foundation of the processes, a femto/atto-second pulse radiolysis measurement system and technique has been developing including generation and measurement methods of attosecond electron beam. In addition to the time-resolved spectroscopy, time-resolved electron diffraction and electron microscopic method and apparatus have been developed and studied. Utilizing our ultra-short electron beam, we are exploring novel interaction of the high-density electron beam and materials. Our research is lying to interdisciplinary fields of radiation chemistry, accelerator science and electron microscopy.

Current Research Programs

  1. 1. Study of basic process of an advanced nanofabrication
  2. 2. Development of femto/atto-second pulse radiolysis technique
  3. 3. Study of atto-second electron beam generation and characterization
  4. 4. Development of Femtosecond time-resolved MeV electron microscopy and electron diffraction

Figure / Graph

  • Fig.1

VIDEO INTRODUCTION

The Institute of Scientific and Industrial Research, Osaka University

contact home japanese
HOME > Research Introduction > Nanoscience and Nanotechnology Center > Department of Advanced Nanofabrication

Department of Advanced Nanofabrication

Staff

  • Photo
    Prof.
    Y. YOSHIDA
  • Photo
    Assoc. Prof.
    J. YANG
  • Photo
    Assis. Prof.
    T. KONDO
  • Photo
    Assis. Prof.
    K. KAN
  • Photo
    Specially Appointed Prof.
    S. TAGAWA

Content of research

Our research target is fundamental physicochemical processes induced by electron beam irradiation to materials for the sake of realizing an advanced nanofabrication. To reveal the foundation of the processes, a femto/atto-second pulse radiolysis measurement system and technique has been developing including generation and measurement methods of attosecond electron beam. In addition to the time-resolved spectroscopy, time-resolved electron diffraction and electron microscopic method and apparatus have been developed and studied. Utilizing our ultra-short electron beam, we are exploring novel interaction of the high-density electron beam and materials. Our research is lying to interdisciplinary fields of radiation chemistry, accelerator science and electron microscopy.

Current Research Programs

  1. 1. Study of basic process of an advanced nanofabrication
  2. 2. Development of femto/atto-second pulse radiolysis technique
  3. 3. Study of atto-second electron beam generation and characterization
  4. 4. Development of Femtosecond time-resolved MeV electron microscopy and electron diffraction

Figure / Graph

  • Fig.1

VIDEO INTRODUCTION