The Institute of Scientific and Industrial Research, Osaka University

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Department of Beam Materials Science

Staff

  • Photo
    Prof.
    T. KOZAWA
  • Photo
    Assoc. Prof.
    Y.MUROYA
  • Photo
    Assis. Prof.
    K. KOBAYASHI

Content of research

The industrial application of quantum beam will rapidly expand in the field such as high-volume production of semiconductor devices. Cancer therapy using ionizing radiation has also attracted much attention. In Department of Beam Materials Science, the radiation-induced chemical reaction and reaction field have been investigated using state-of-the-art quantum beam (electron, extreme ultraviolet radiation, laser, synchrotron radiation, X-ray, g-ray, ion beam). We have studied the chemical reaction system from the energy deposition on materials to the expression of material function. On the basis of these studies, we have designed a noble chemical reaction system. Investigation of radiation-induced fast reactions of materials at extreme conditions (high temperature / pressure conditions up to supercritical regime) is also ongoing.

Current Research Programs

  1. 1. Challenge toward nano chemistry in high-volume production of semiconductor devices.
  2. 2. Radiation chemistry in the energy range of extreme ultraviolet.
  3. 3. Design of next generation resist materials – electron, hole, and energy transfer in condensed matter.
  4. 4. Study of radiation-induced reaction of organic and bio-materials using pulse radiolysis.
  5. 5. Mechanism of genetic damage caused by ionizing-radiation
  6. 6. Study on Nano-materials using quantum beam.
  7. 7. Radiation chemistry study on high temperature/ pressure and supercritical solutions.

Figure / Graph

VIDEO INTRODUCTION

The Institute of Scientific and Industrial Research, Osaka University

contact home japanese

Department of Beam Materials Science

Staff

  • Photo
    Prof.
    T. KOZAWA
  • Photo
    Assoc. Prof.
    Y.MUROYA
  • Photo
    Assis. Prof.
    K. KOBAYASHI

Content of research

The industrial application of quantum beam will rapidly expand in the field such as high-volume production of semiconductor devices. Cancer therapy using ionizing radiation has also attracted much attention. In Department of Beam Materials Science, the radiation-induced chemical reaction and reaction field have been investigated using state-of-the-art quantum beam (electron, extreme ultraviolet radiation, laser, synchrotron radiation, X-ray, g-ray, ion beam). We have studied the chemical reaction system from the energy deposition on materials to the expression of material function. On the basis of these studies, we have designed a noble chemical reaction system. Investigation of radiation-induced fast reactions of materials at extreme conditions (high temperature / pressure conditions up to supercritical regime) is also ongoing.

Current Research Programs

  1. 1. Challenge toward nano chemistry in high-volume production of semiconductor devices.
  2. 2. Radiation chemistry in the energy range of extreme ultraviolet.
  3. 3. Design of next generation resist materials – electron, hole, and energy transfer in condensed matter.
  4. 4. Study of radiation-induced reaction of organic and bio-materials using pulse radiolysis.
  5. 5. Mechanism of genetic damage caused by ionizing-radiation
  6. 6. Study on Nano-materials using quantum beam.
  7. 7. Radiation chemistry study on high temperature/ pressure and supercritical solutions.

Figure / Graph

VIDEO INTRODUCTION