Our research target is fundamental physicochemical processes induced by electron beam irradiation to materials for the sake of realizing an advanced nanofabrication. To reveal the foundation of the processes, a femto/atto-second pulse radiolysis measurement system and technique has been developing including generation and measurement methods of attosecond electron beam. In addition to the time-resolved spectroscopy, time-resolved electron diffraction and electron microscopic method and apparatus have been developed and studied. Utilizing our ultra-short electron beam, we are exploring novel interaction of the high-density electron beam and materials. Our research is lying to interdisciplinary fields of radiation chemistry, accelerator science and electron microscopy.