Director Prof. K. KOMATANI
Content of research
Electronic Processing Laboratory was founded as a common facility for the institute. It acts as a workshop for photonic/electronic materials/devices, composite materials and organic materials/devices. It also has an anechoic chamber that can be used for acoustic analyses, psychological experiments, etc.
The laboratory has the following apparatuses at present: atomic-force/digital microscopes, a photolithography system, a sputter deposition system, a high vacuum evaporation system, a reactive ion etching system, a crystal cleaving system, a wire bonding system, and a small-size clean room. The anechoic chamber measures 4.0 x 7.2 meters (4.0 meters in height) and the sound pressure level in it is designed to be below 30dB.