古澤研究室
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2021 論文

  1. Gel permeation chromatography analysis of remaining components of electron-beam-irradiated ZEP520A resist after development,
    Ayako Nakajima, Manabu Hoshino and Takahiro Kozawa,
    Jpn. J. Appl. Phys. (2021)60, 010901.

  2. Dissolution kinetics of main-chain-scission-type resist in organic developers,
    Ayako Nakajima, Keiko Matsuo and Takahiro Kozawa,
    Appl. Phys. Express(2021)14 026501.

  3. Fast Autooxidation of a Bis-Histidyl–Ligated Globin from the Anhydrobiotic Tardigrade, Ramazzottius varieornatus, by Molecular Oxygen,
    Kazuo Kobayashi, JeeEun Kim, Yohta Fukuda, Takahiro Kozawa, Tsuyoshi Inoue,
    J. Biochem.(2021)169, 663-673.

  4. Functional and structural characterization of a flavoprotein monooxygenase essential for biogenesis of tryptophylquinone cofactor,
    Toshinori Oozeki, Tadashi Nakai, Kazuki Kozakai, Kazuki Okamoto, Shun’ichi Kuroda, Kazuo Kobayashi, Katsuyuki Tanizawa and Toshihide Okajima,
    Nat Commun(2021)12 933.

  5. Application of machine learning to stochastic effect analysis of chemically amplified resists used for extreme ultraviolet lithography,
    Kazuki Azumagawa and Takahiro Kozawa,
    Jpn. J. Appl. Phys.(2021)60, SCCC02.

  6. Pattern collapse mitigation by controlling atmosphere during development process for semiconductor lithography,
    Masahiko Harumoto, Tomohiro Motono, Andreia Figueiredo dos Santos, Chisayo Mori, Yuji Tanaka, Harold Stokes, Masaya Asai, Julius Joseph Santillan, Toshiro Itani and Takahiro Kozawa,
    Jpn. J. Appl. Phys.(2021)60, SCCA03.

  7. Estimation of electron affinity of photoacid generators: density functional theory calculations using static and dynamic models,
    Kazumasa Okamoto and Takahiro Kozawa,
    Jpn. J. Appl. Phys.(2021)60, SCCC03.

  8. Effect of initial molecular weight distribution on pattern formation of main-chain-scission-type resists,
    Ayako Nakajima, Manabu Hoshino and Takahiro Kozawa,
    Jpn. J. Appl. Phys.(2021)60, 056501.

  9. Dependence of dose rate on the sensitivity of the resist under ultra-high flux extreme ultraviolet (EUV) pulse irradiation,
    Kazumasa Okamoto, Shunpei Kawa, Yuta Ikari, Shigeo Hori, Akihiro Konda, Koki Ueno, Yohei Arai, Masahiko Ishino, Thanh-Hung Dinh, Masaharu Nishikino, Akira Kon, Shigeki Owada, Yuichi Inubushi, Hiroo Kinoshita and Takahiro Kozawa,
    Applied Physics Express (2021)14, 066502.

  10. Analysis of dissolution kinetics of narrow polydispersity poly(4-hydroxystyrene) in alkaline aqueous solution using machine learning,
    Naoki Tanaka, Kyoko Watanabe, Kyoko Matsuoka, Kazuki Azumagawa, Takahiro Kozawa, Takuya Ikeda, Yoshitaka Komuro and Daisuke Kawana,
    Jpn. J. Appl. Phys.(2021)60, 066503.

  11. Electron Beam Irradiation of Lead Halide Perovskite Solar Cells: Dedoping of Organic Hole Transport Materials despite Hardness of the Perovskite Layer,
    Yoshiyuki Murakami, Fumitaka Ishiwari, Kazumasa Okamoto, Takahiro Kozawa and Akinori Saeki,
    ACS Applied Materials & Interfaces (2021)13, 24824-24832.

  12. Study on radical dianions of carboxylates used as ligands of metal oxide nanocluster resists,
    K. Ikeuchi, Y. Muroya, T. Ikeda, Y. Komuro, D. Kawana and T. Kozawa,
    Jpn. J. Appl. Phys. (2021)60 076503.

  13. Resist Thickness Dependence of Latent Images in Chemically Amplified Resists Used for Electron Beam Lithography,
    Takahiro Kozawa and Takao Tamura,
    J. Photopolym. Sci. Technol.(2021)34 17-25.

  14. Non-chemically Amplified Negative Molecular Resist Materials using Polarity Change by EUV Exposure,
    K. Fujisawa, H. Maekawa, H. Kudo, K. Okamoto, and T. Kozawa,
    J. Photopolym. Sci. Technol. 34 (2021) 87-93.

  15. Analysis of mitigating factors for line edge roughness generated during electron beam lithography using machine learning,
    Yuqing Jin, Takahiro Kozawa and Takao Tamura,
    Jpn. J. Appl. Phys. (2021)60 076509.

  16. Theoretical study of interfacial effects on low-energy electron dynamics in chemically amplified resist processes of photomask fabrication,
    Takahiro Kozawa and Takao Tamura,
    Jpn. J. Appl. Phys.(2021)60 086503.

  17. Scavenging of "dry" electrons prior to hydration by azide ions: Effect on the formation of H2 in the radiolysis of water by 60Co γ-rays and tritium β-electrons.,
    Sunuchakan Sanguanmith, Jintana Meesungnoen, Yusa Muroya, and Jean-Paul Jay-Gerin,
    Can. J. Chem.(2021).

  18. γ-Radiation synthesis of ultrasmall noble metal (Pd, Au, Pt) nanoparticles embedded on boron nitride nanosheets for high-performance catalysis,
    Yi Wang, Jialiang Chen, Lan Wang, Hanqin Weng, Zhihao Wu, Limin Jiao. Yusa Muroya, Shinichi Yamashita, Sheng Cheng, Fuhai Li, Hongbing Chen, Wei Huang and Mingzhang Lin,
    Ceramics International (2021) 47 26963-26970.