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2022 論文

  1. Formulation of trade-off relationships between resolution, line edge roughness, and sensitivity in sub-10 nm half-pitch region for chemically amplified extreme ultraviolet resists,
    Takahiro Kozawa,
    Jpn. J. Appl. Phys.(2022)61 016501.

  2. Relationship between surface free energy and development process (swelling and dissolution kinetics) of poly(4-hydroxystyrene) film in water and 2.38 wt% tetramethylammonium hydroxide aqueous solution,
    Yuko Tsutsui Ito and Takahiro Kozawa,
    Jpn. J. Appl. Phys.(2022)61 016502.

  3. Photo- & radio-chromic iron-doped tungstic acids fabricated via submerged photosynthesis,
    Shuntaro Murakami, Lihua Zhang, Melbert Jeem, Kazumasa Okamoto, Yuki Nakagawa, Tamaki Shibayama, Masato Ohnuma, Seiichi Watanabe,
    Optical Materials(2022)124 111966.

  4. Fabrication of color-toned micro/nanopattern surface by submerged photosynthesis method,
    Jumpei Tsukamura, Yuki Takahashi, Lihua Zhang, Melbert Jeem, Kazumasa Okamoto, Seiichi Watanabe,
    Microelectronic Engineering(2022)256 111727.

  5. Effects of film thickness and alkaline concentration on dissolution kinetics of poly(4-hydroxystyrene) in alkaline aqueous solution,
    Naoki Tanaka, Kyoko Matsuoka, Takahiro KOZAWA, Takuya Ikeda, Yoshitaka Komuro and Daisuke Kawana,
    Jpn. J. Appl. Phys.(2022)61 SD1016.

  6. Decarboxylation efficiency of carboxylic acids as ligands of metal oxide nanocluster resists upon γ-ray irradiation,
    Tomoe Otsuka, Yusa Muroya, Takuya Ikeda, Yoshitaka Komuro, Daisuke Kawana and Takahiro KOZAWA,
    Jpn. J. Appl. Phys.(2022)61 036503.

  7. Classification of lines, spaces, and edges of resist patterns in scanning electron microscopy images using unsupervised machine learning,
    Yuqing Jin and Takahiro KOZAWA,
    Jpn. J. Appl. Phys.(2022)61 056505.

  8. Effect of surface free energy of organic underlayer on dissolution kinetics of poly(4-hydroxystyrene) film in tetramethylammonium hydroxide aqueous developer,
    Tomoe Otsuka, Yuqing Jin, Naoki Tanaka, and Takahiro KOZAWA,
    Jpn. J. Appl. Phys.(2022)61 056503.

  9. Interdomain Electron Transfer in Flavohemoglobin from Candida norvegensis with Antibiotic Azole Compounds,
    Kazuo Kobayashi, Jotaro Igarashi, and Takahiro Kozawa,
    FEBS Letters(2022)596 938-946.

  10. Dependence of photoresist dissolution dynamics in alkaline developers on alkyl chain length of tetraalkylammonium hydroxide,
    Masahiko Harumoto, Julius Joseph Santillan, Toshiro Itani, and Takahiro Kozawa,
    Jpn. J. Appl. Phys.(2022)61 056506.