Department of Advanced Nanofabrication
Prof. Y. YOSHIDA
Assoc. Prof. J. Yang
Assist. Prof. K. KAN
Spec. App. Res. H. SHIBATA
　The subject is the development of high performance nanofabrication by using quantum beam. The basic processes of the nanofabrication are studied by means of the time-space reaction analysis method which is a new technique to realize the reaction mechanism in nano-space. The femtosecond pulse radiolysis and atosecond pulse radiolysis which contribute to the new analysis technique are also developed by using a new electron linac. The new application of the nanofabrication, such as the development of new devices by using the interaction of quantum beams with the nano structure, is also studied.
Current Research Programs
- Basic process of high performance nanofabrication.
- Time-space analysis in nano-space by using quantum beams.
- Femtosecond pulse radiolysis.
- Atosecond pulse radiolysis.
- Interaction of structure with quantum beams.
Web site of Department of Beam Science and Nanofabrication (Y. YOSHIDA Lab.)
