Institute of Scientific and Industrial Research, Osaka University

　　　Oiwa Laboratory


    2023

  • “Semiconductor spin qubits for quantum networking”
    Akira Oiwa
    Asia Pacific Physics Week 2023 (APPW2023) Online, 7 November, 2023 (Plenary).

    2022

  • “Enhanced Transmission by Surface Plasmon Antenna for Single Photoelectron Trapping in A Lateral GaAs Quantum Dot”
    R. Fukai, Y. Sakai, T. Fujita, H. Kiyama, A. Ludwig, A. D. Wieck, and A. Oiwa
    WORKSHOP ON INNOVATIVE NANOSCALE DEVICES AND SYSTEMS (WINDS2022), 8 December, 2022, Hawaii (Oral)

  • “Fast single-spin qubit operation and its coherence time enhanced by feedback control” (oral)
    Y. Matsumoto, T. Fujita, A. Ludwig, A.D. Wieck, K.Koike,T.Miyoshi, and A. Oiwa
    ISpin qubit 5 5-9th, September, 2022

  • “Fast single-spin qubit operation and its coherence time enhanced by feedback control” (oral)
    Y. Matsumoto, T. Fujita, A. Ludwig, A.D. Wieck, K.Koike,T.Miyoshi, and A. Oiwa
    International Conference on the Physics of Semiconductors 30th, June, 2022

  • “Photon-spin quantum interface based on gate-defined semiconductor quantum dots”
    A. Oiwa
    The 15th Asia Pacific Physics Conference (APPC15), 24th August, 2022, Online (Invited).

    2021

  • “Photon-spin quantum interface using gate-defined quantum dots combined with nano-photonic structures”
    A. Oiwa
    2021 International Conference on Solid State Devices and Materials (SSDM2021), 7th September 2021, Online (Invited).

    2020

  • “Accelerated electric-dipole spin resonance in a quantum dot array”
    T. Fujita
    CEMS Topical Meeting Online, Recent Advances in Semiconductor Qubits, 9th March 2021,　Online (Invited)

  • “Photon-spin quantum interface using gate-defined quantum dots for quantum internet”
    A. Oiwa
    The 21st RIES-Hokudai International Symposium, 10th December, 2020, Online (Invited)

  • “Characterization of a surface plasmon antenna fabricated on a gate-defined lateral quantum dot”
    R. Fukai,Y. Sakai, T. Nakagawa, T. Fujita, H. Kiyama, A. Ludwig, A. D. Wieck, A. Oiwa
    2020 International Conference on Solid State Devices and Materials (SSDM2020), 29th September, 2020, Online

  • “Design of Semiconductor Bull’s-eye Optical Cavity for High-efficiency Quantum Media Conversion using a Gate-defined Quantum Dot”
    S. Ji, T. Tajiri, H. Kiyama, A. Oiwa, and S. Iwamoto
    2020 International Conference on Solid State Devices and Materials (SSDM2020), 30th September, 2020, Online

  • “Spin-orbit induced spin manipulation by spin shuttling in multiple dots”
    Y. Matsumoto, T. Fujita , A. Ludwig , A. D. Wieck , A. Oiwa
    11th International Cinference on Quantum Dots (QD2020), 11th December, 2020 Online

    2019

  • “Photon-spin quantum interface using gate-defined quantum dots” (Invited)
    A. Oiwa
    Canada-Japan Workshop on Hybrid Quantum Systems (HQS), Ottawa, Canada [link]

  • “Quantum interface from photons to electron spins in gate-defined GaAs quantum dots” (Invited)
    A. Oiwa
    Spin Canada 2019, 24th June, 2019, Montebello Quebec, Canada [link]

  • “Transferring quantum states form single photons to single electron spins in gate-defined quantum dots” (Invited)
    A. Oiwa
    Frontiers in Quantum Information Physics and technologies (FQIPT), 10th June, 2019, Tokyo, Japan [link]



    • 2018

  • “Effect of magnetic barrier layer thickness on magnetic properties in magnetic/nonmagnetic GdN/GaN superlattices grown by PA-MBE” (Poster)
    T. Kojima，S. Hasegawa
    International workshop of nitride semiconductors 2018 (IWN2018), November 15, 2018, Kanazawa, Japan

  • “Magneto-optical characterization of GaN/TbN superlattice structures grown by PA-MBE” (Poster)
    S. Fujimori and S. Hasegawa
    International workshop of nitride semiconductors 2018 (IWN2018), November 15, 2018, Kanazawa, Japan

  • “Fabrications and transport properties of SiGe self-assembled quantum dots” (Oral)
    M. Tanaka, K. Kawaguchi, H. Kiyama, M. Bamesreiter, D. Bougeard, A. Oiwa
    2018 International Conference on Solid State Devices and Materials (SSDM2018), September 9-13, 2018, Tokyo, Japan

  • “Transport through quantum dots formed in a (110) GaAs quantum well” (Poster)
    T. Nakagawa, R. Fukai, Y. Sakai, Y. Sakai, T. Fujita, H. Kiyama, T. Nakajima, J. Ritzmann, A. Ludwig, A. D. Wieck
    Spin qubit 4, September, 2018

  • “Magnetic Doppler Broadening Measurement on Gadolinium-doped GaN” (Poster)
    M. Maekawa, S. Sakai, S. Hagiwara, A. Miyashita, K. Wada, A. Kawasuso, A. Yabuuchi, S. Hasegawa
    The 18th International Conference on Positron Annihilation (ICPA-18), August, 2018

  • “Single-electron charge sensing in self-assembled quantum dots” (Poster)
    Haruki Kiyama, Alexander Korsch, Naomi Nagai, Yasushi Kanai, Kazuhiko Matsumoto, Kazuhiko Hirakawa, Akira Oiwa
    34th International Conference on the Physics of Semiconductors, July, 2018

  • “Photon-spin conversion using gate-defined GaAs quantum dots” (Invited)
    Akira Oiwa
    QD2018, June, 2018



    • 2017

  • "Photon-electron spin conversion in gate-defined GaAs quantum dots and developing Poincare interface" (Oral)
    Akira Oiwa
    JST-TU Delft Quantum Technology workshop, October 17, 2017, Delft, Netherland

  • "Single-shot ternary readout of electron spin states in a quantum dot coupled to quantum Hall edge states" (Oral)
    Haruki Kiyama
    JST-TU Delft Quantum Technology workshop, October 17, 2017, Delft, Netherland

  • "Photon-spin Poincaré interface using electron spins in quantum dots" (Oral)
    Akira Oiwa
    Workshop Advanced Material Sciences 2017, September 21, 2017, Dresden, Germany

  • "Kondo effect in a self-assembled SiGe quantum dot" (Poster)
    R. Shikishima, H. Kiyama, K. Kawaguchi, M. Bamesreiter, D. Bougeard, and A. Oiwa
    2017 Silicon Quantum Electronics Workshop, Poster #19, August 18, 2017, Oregon, USA

  • "Kondo effect in a self-assembled SiGe quantum dot" (Poster)
    R. Shikishima, H. Kiyama, K. Kawaguchi, M. Bamesreiter, D. Bougeard, and A. Oiwa
    18th International Conference on Modulated Semiconductor Structures (MSS-18), MS-4, August 1, 2017, Penn State University, USA

  • "Kondo effect and superconducting transport in SiGe self-assembled quantum dot transistors" (Invited)
    R. Shikishima, T. Kagawaguchi, H. Kiyama, M. Bamesreiter, D. Bougeard, and A. Oiwa
    The second international conference on Quantum Information、Quantum Topological Orders and Emergent Spacetime on Quantum Simulators, July 5, 2017, Zhangjiajie China

  • "Photon-spin Poincaré interface using electron spins in quantum dots" (Invited)
    Akira Oiwa
    JSPS Core-to-Core SANKEN Program, Purdue Seminar “Seminar for Sensing Technology by Nano Materials” June 22, 2017, Purdue University, USA

  • "Kondo effect and superconducting transport in SiGe self-assembled quantum dots" (Poster)
    R. Shikishima, T. Kagawaguchi, H. Kiyama, M. Bamesreiter, D. Bougeard, and A. Oiwa
    Spintech 9, B-166, June 7, 2017, Fukuoka, Japan

  • "Design of Surface Plasmon Antennas on Gate-defined Lateral Quantum Dots" (Poster)
    R. Fukai, T. Nakagawa, H. Kiyama, and A. Oiwa
    Spintech 9, B-112, June 7, 2017, Fukuoka, Japan

  • "Transport and optical properties of (110) GaAs quantum wells for photon-spin quantum state conversion using heavy hole states" (Poster)
    T. Nakagawa, Y. Sakai, R. Fukai, H. Kiyama, J. Ritzmann, A. Ludwig, A. D. Wieck, and A. Oiwa
    Spintech 9, A-125, June 7, 2017, Fukuoka, Japan

  • "Magnetotarnsport in narrow gap semiconductor InSb Quantum Wells" (Poster)
    M. Tada, H. Kiyama, K. Akahane and A. Oiwa
    Spintech 9, A-103, June 7, 2017, Fukuoka, Japan



    • 2016

  • "Coatings of Boron Nitride Films for Vacuum Tribology by Reactive "(Oral)
    Masao Noma, Koji Eriguchi, Michiru Yamashita, Shigehiko Hasegawa
    2016 The 7th Tsukuba International Coating Symposium, December 8, 2016, Tsukuba, Japan

  • "Friction coefficient lowering in high-hardness boron nitride films under ultra-high vacuum"(Poster)
    Masao Noma, Koji Eriguchi, Michiru Yamashita, Shigehiko Hasegawa
    2016 The 16th International Conference on Precision Engineering, November 15, 2016, Hamamatsu, Japan

  • "Formation of superhard c-BN films on the body and edge of cutting "(Oral)
    Masao Noma, Koji Eriguchi, Michiru Yamashita, Shigehiko Hasegawa
    2016 AVS 63rd International Symposium and Exhibition, November 6-11, 2016, Nashville, USA

  • "Design of bull’s eye structures a on gate-defined lateral quantum dots"(Oral)
    R. Fukai, T. Nakagawa, H. Kiyama and A. Oiwa
    2016 International Conference on Solid State Devices and Materials (SSDM2016), September 26-29, 2016, Tsukuba, Japan

  • "Design of bull’s eye structures a on gate-defined lateral quantum dots"(Poster)
    R. Fukai, T. Nakagawa, H. Kiyama and A. Oiwa
    9th International Conference on Physics and Applications of Spin-Related Phenomena in Solids (PASPS9), August 8-11, 2016, Kobe, Japan

  • "Single-electron charge sensing in InAs self-assembled quantum dots"(Poster)
    H. Kiyama, T. Hirayama, R. Shikishima, S. Matsuo, S. Baba, N. Nagai, K. Hirakawa, S. Tarucha, and A. Oiwa
    9th International Conference on Physics and Applications of Spin-Related Phenomena in Solids (PASPS9), August 8-11, 2016, Kobe, Japan

  • "Magnetic and magneto-optical properties of Ga1-xGdxN/GaN superlattices with GdN mole fraction enhanced up to 100%"(Oral)
    Y.Sugeta and S.Hasegawa
    The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18), August 7-12, 2016, Nagoya Congress Center, Nagoya, Japan

  • "Effects of carrier-doping on Sm-induced levels in GaSmN grown by plasma-assisted molecular beam epitaxy"(Poster)
    Y. Miyazaki, K. Dehara, S. Hasegawa
    The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18), August 7-12, 2016, Nagoya Congress Center, Nagoya, Japan

  • "Fabrication of YH3 thin film using Pd/Ni overlayer"(Poster)
    K. Yabuki, M. Sakai, K. Iizasa, K. Higuchi, A. Kitajima, S. Hasegawa, O. Nakamura
    The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18), August 7-12, 2016, Nagoya Congress Center, Nagoya, Japan

  • "Purification of commercial yttrium metal: Removal of fluorine"(Poster)
    A. Takenouchi, T. Otomo, K. Niwa, Y. Saito, M. Sakai, D. Kirigane, M. Kosaka, S. Hasegawa
    The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18), August 7-12, 2016, Nagoya Congress Center, Nagoya, Japan

  • "Fabrication of Sc and ScHx (x≒2) thin film and their Hall effect"(Poster)
    M. Nishimagi, T. Matsunaga, M. Sakai, K. Iizasa, K. Higuchi, A. Kitajima, S. Hasegawa
    The 18th International Conference on Crystal Growth and Epitaxy (ICCGE-18), August 7-12, 2016, Nagoya Congress Center, Nagoya, Japan

  • "Single-shot ternary of electron spin states in a quantum dot coupled quantum Hall edge states"(Oral)
    H. Kiyama, T. Nakajima, S. Teraoka, A. Oiwa, and S. Tarucha
    31th International Conference on Physics of Semiconductors (ICPS2016), July 31- August 5, 2016, Beijing, China.

  • "Conversion from single photons to single electron spins in gate-defined quantum dots"(Invited)
    A. Oiwa
    31th International Conference on Physics of Semiconductors (ICPS2016), July 31- August 5, 2016, Beijing, China.

  • "Efficient control over wavefunctions of electrons in self-assembled InAs quantum dots using side-gating"(poster)
    R. Shikishima, H. Kiyama, S. Baba, T. Hirayama, N. Nagai, K. Hirakawa, S. Tarucha, and A. Oiwa
    Frontiers in Quantum Materials and Devices Workshop (FQMD2016), June 13-14, 2016, Wako, Japan

  • "Single-shot Readout of Three Two-electron Spin States in a Quantum Dot　Coupled to Quantum Hall Edge States"(poster)
    H. Kiyama, T. Nakajima, S. Teraoka, A. Oiwa, and S. Tarucha
    Frontiers in Quantum Materials and Devices Workshop (FQMD2016), June 13-14, 2016, Wako, Japan

  • “Coherent conversion from photons to electron spins using quantum dots"(Invited)
    A. Oiwa
    China-Japan Inetrnational Workshop on Quantum Technologies (QTech2016), May 13-14, 2016, Beijing, China.



    • 2015

  • “Conversion from single photons to single electron spins in quantum dots”(Invited)
    A. Oiwa
    E-IMR/ICC-IMR/TFC/ERATO SQR International Workshop 2015, Spin Energy Materials, December 3-4, 2015, Sendai, Japan

  • “Transport though InAs self-assembled quantum dots controlled by sidegate voltages”(Oral)
    Akira Oiwa, Ryoki Shikishima, Takashi Hirayama, Haruki Kiyama, Shoji Baba, Naomi Nagai, Kazuhiko Hirakawa, and Seigo Tarucha
    International Symposium on Advanced Nanodevices and Nanotechnologes, Nov. 29-Dec. 4，2015, Hawaii USA

  • "Photon-electron spin coupling via angular momentum conversion in a gate-defined GaAs double quantum dot"(Invited)
    A. Oiwa, T. Fujita, and S. Tarucha
    International Symposium on Nanoscale Transport and Nanotechnology (ISNTT2015), November 17-20, 2015, Atsugi, Japan

  • "Effect of electrode-geometries on the transport properties of InAs self-assembled quantum dots"(Poster)
    H. Kiyama, R. Shikishima, S. Baba, T. Hirayama, N. Nagai, K. Hirakawa, S. Tarucha, and A. Oiwa
    International Symposium on Nanoscale Transport and Nanotechnology (ISNTT2015), November 17-20, 2015, Atsugi, Japan

  • "Growth Evolution of γ’-Fe4N Films Grown on GaN(0001) and Their Interfacial Structure"(Poster)
    M. Kimura and S. Hasegawa
    The 6th International Symposium on Growth of III-Nitrides (ISGN-6), November 8-13, 2015, Hamamatsu, Japan

  • "Structural and Magnetic Characterization of Sm-doped GaN Grown by Plasma-Assisted Molecular Beam Epitaxy"(Poster)
    K. Dehara, Y. Miyazaki, and S. Hasegawa
    The 6th International Symposium on Growth of III-Nitrides (ISGN-6), November 8-13, 2015, Hamamatsu, Japan

  • "Effect of dimensionality reduction on magnetic properties in dilute magnetic semiconductor GaGdN"(Invited)
    S. Hasegawa
    The 5th International Workshop on Epitaxial Growth and Fundamental Properties of Semiconductor Nanostructures (SemiconNano2015), September 6-11, 2015, Hsinchu, Taiwan

  • “Vacancy Identification in GaN Doped with Rare Earth Element by XANES”(Poster)
    A. Koide, K. Niki, T. Fujikawa, S. Emura
    16th International Conference on X-ray Absorption Fine Structure, August 23 – 28, Karlsruhe, Germany

  • "Photon-electron spin coupling using gate-defined GaAs double quantum dots"(Invited)
    A. Oiwa, T. Fujita and S. Tarucha
    SpinTech VIII, August 10-13, 2015, Basel Switzerland

  • "Single‐shot readout of electron spins in a quantum dot using spin filtering by quantum Hall edge states"(Poster)
    H. Kiyama, A. Oiwa, and S. Tarucha
    SpinTech VIII, August 10-13, 2015, Basel Switzerland

  • “Environment Identification of Nitrogen Vacancy in GaN:Gd by X-ray Spectroscopy”(Oral)
    S. Emura, A. Koike, K. Shirai, K. Niki, and T. Fujikawa
    28th International Conference on Defects in Semiconductors (ICDS 2015), July 27 – 31, 2015, Espoo, Finland

  • “Structure of Vacancies in Gd-doped GaN and Its Detection by XANES Spectra”(Poster)
    T. A. Nugraha, K. Shirai, S. Emura and T. Oguchi
    28th International Conference on Defects in Semiconductors (ICDS 2015), July 27 – 31, 2015, Espoo, Finland

  • "Selective Injection of Single Electron Spins into a Quantum Dot using Spin-polarized　Non-equilibrium Quantum Hall Edge Channels"(Poster)
    H. Kiyama, T. Nakajima, S. Teraoka, A. Oiwa, and S. Tarucha
    21st International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-21), July 26-31, 2015, Sendai, Japan

  • "Transport properties of InAs self-assembled quantum dots with different electrode geometries"(Poster)
    R. Shikishima, H. Kiyama, S. Baba, T. Hirayama, N. Nagai, K. Hirakawa, S. Tarucha, and A. Oiwa
    21st International Conference on Electronic Properties of Two-Dimensional Systems (EP2DS-21), July 26-31, 2015, Sendai, Japan

  • "Studies of strained graphene with thin film shrinkage methods"(Invited)
    H. Shioya, M. F. Craciun, M. Yamamoto, S.Russo, S.Tarucha
    the 2015 Energy Materials Nanotechnology (EMN) Istanbul Meeting, Istanbul, July, 2015

  • “Conversion from single photons to single electron spins using GaAs-based double quantum dots”(Invited)
    A. Oiwa, T. Fujita and S. Tarucha
    Symposium on New Perspectives in Spintronics and Mesoscopic Physics (NPSMP2015), June 10-12, 2015, ISSP, University of Tokyo, Chiba

  • “Single-shot readout of electron spins in a quantum dot using spin filtering by quantum Hall edge states”(Poster)
    H. Kiyama, A. Oiwa, and S. Tarucha
    Symposium on New Perspectives in Spintronics and Mesoscopic Physics (NPSMP2015), June 10-12, 2015, ISSP, University of Tokyo, Chiba

  • “Fabrication and transport properties of InAs self-assembled quantum dots contacted with nanogap electrodes”(Poster)
    H. Kiyama, T. Hirayama, R. Shikishima, S. Baba, N. Nagai, K. Hirakawa, S. Tarucha, and A. Oiwa
    1st International Workshop on Topological Electronics (Topotronics2015), March 9-11, 2015, Okinawa Institute of Science and Technology, Okinawa



    • 2014

  • “Single-shot readout of electron spin states in a quantum dot coupled to quantum Hall edge states”(Poster)
    H. Kiyama, A. Oiwa, and S. Tarucha
    The 18th SANKEN International Symposium, December 10-11, 2014, Congres Convention Center, Osaka

  • “Photon-spin coupling using electron spins in quantum dots”(Poster)
    A. Oiwa, T. Fujita, K. Morimoto, M. Larsson, G. Allison, H. Kiyama, A. Ludwig, A. D. Wieck, and S. Tarucha
    The 18th SANKEN International Symposium, December 10-11, 2014, Congres Convention Center, Osaka

  • “Unique Behavior of Photoluminescence from Small Size Nanowires”(Poster)
    M. Almokuhtar, S. Emura, and A. Oiwa,
    The 18th SANKEN International Symposium, December 10-11, 2014, Congres Convention Center, Osaka

  • “Effects of ion energy on surface and mechanical properties of BN films formed by a reactive plasma-assisted coating method”
    M. Noma, K. Eriguchi, S. Hasegawa, M. Yamashita, and K. Ono
    36th International Symposium on Dry Process, November 27-28, 2014, Yokonama, Japan

  • “A Novel Reactive Plasma-Assisted Coating Technique (RePAC) for Thin BN/Crystalline-Si Structures and their Mechanical and Electrical Properties”
    K. Eriguchi, M. Noma, S. Hasegawa, M. Yamashita, and K. Ono
    AVS 61st International Symposium and Exhibition, November 9-14, 2014, Baltimore, USA

  • “Non-local Detection of Spin Injection through a Co/GaN Schottky Barrier”
    Shigehiko Hasegawa and Hiroaki Yamaguchi
    The 7th International Symposium on Surface Science, November 2-6, 2014, Matsue, Japan

  • “Conversion from a single photon to a single electron spin using electrically controlled quantum dots”(Invited)
    A. Oiwa, T. Fujita, K. Morimoto, M. Larsson, G. Allison, H. Kiyama, A. Ludwig, A. D. Wieck, and S. Tarucha
    Fujihara Seminar: Real-time Dynamics of Physical Phenomena and Manipulation by External Fields, September 23-27, 2014, Grand Hotel New Oji, Tomakomai, Hokkaido

  • “Angular momentum conversion from single photons to single electron spins in a lateral double quantum dot“(Invited)
    A. Oiwa, T. Fujita, K. Morimoto, H. Kiyama, G. Allison, M. Larsson, A. Ludwig, A.D. Wieck and S. Tarucha
    Solid State Devices and Materials (SSDM2014), September 11th, 2014, Tsukuba International Congress Center, Tsukuba, Japan

  • “On Oscillatory Structures Hanging on Main Photoluminescence from Fine GaN Nanorods”(Poster)
    S. Emura and M. Almokhtar
    The 32th International Conference on the Physics of Semiconductors (ICPS32), August 10-15, 2014, Austin, Texas, USA

  • “Quantum Confinement of Phonon in InGaN/GaN Multi-quantum Disks”(Poster)
    S. Emura, D. Krishnamurthy, and K. Sato
    The 32th International Conference on the Physics of Semiconductors (ICPS32), August 10-15, 2014, Austin, Texas, USA

  • “Growth and Characterization of Fe Nitride on GaN(0001)”(Oral)
    Shigehiko Hasegawa, Shota Yamauchi, Masaru Yoneoka, Hiroaki Yamaguchi
    5th International Symposium on Growth of III-Nitrides, May 19-22, 2014, Atlanta, USA

  • “Structural and Mechanical Characterization of BN Films Grown on Si(001) by Magnetically-Enhanced Plasma Ion Plating”(Poster)
    S. Hasegawa, M. Noma, M. Yamashita, and K. Eriguchi
    5th International Symposium on Growth of III-Nitrides, May 19-22, 2014, Atlanta, USA

  • "Single-shot readout electron spins in a quantum dot coupled to quantum Hall edge states"(poster)
    H. Kiyama, A. Oiwa, and S. Tarucha
    8th International Conference on Quantum Dots (QD 2014), May 11-16, 2014, Pisa, Italy
    　
  • “Effects of ion-bombardment damage on mechanical properties of c-BN thin-films formed by a magnetically-enhanced plasma ion plating method"(Poster)
    M. Noma, K. Eriguchi, S. Hasegawa, M.Yamashita, Y. Takao, N. Terayama, K. Ono
    The 6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials / 7th International Conference on Plasma-Nano Technology & Science, March 5th, 2014, Nagoya, Japan

  • “Conversion of angular momentum from single photons to single electron spins in electrically controlled quantum dots”(Invited)
    A. Oiwa
    American Physical Society March meeting 2014, March 3rd, 2014, Denver, Colorado, USA

  • “Single-shot readout of electron spins in a quantum dot coupled to quantum Hall edge states”(Oral)
    H. Kiyama, A. Oiwa, and S. Tarucha
    American Physical Society March meeting 2014, March 3rd, 2014, Denver, Colorado, USA

  • “Impacts of plasma process parameters on mechanical properties of c-BN thin films”(Oral)
    M. Noma, K. Eriguchi, S. Hasegawa, M.Yamashita, Y. Takao, N. Terayama, K. Ono
    8th International Conference on Reactive Plasmas / 31st Symposium on Plasma Processing, 5B-AM-O2, February 5th, 2014, Nagoya, Japan