The purpose of nanofabrication shop is the promotion of nanotechnologyrelated research by use of equipments and special skills for nanotechnology researchers and students belonging to ISIR. This shop fabricates nanodevices for the ISIR researchers and develops devices for researchers who want to apply those devices for their own experiments. In Advanced Nanotechnology Instrument Laboratory, the fine nanofabrication system based on electron beam lithography, the nano-device fabrication system and nano-device characterization systems on structure and electrical properties of nano device have been installed, and enable us to study various nano-materials and nano-devices composed of inorganic/ soft organic /bio materials. This laboratory will continuously develop and work to promote advanced Nanotechnology.