The Quantum Beam Materials Science Division studies chemical reactions and reaction fields, induced in materials by quantum beams under extreme conditions such as in the single-nanometer space region or in high-temperature, high-pressure and supercritical conditions, Using state-of-the-art quantum beams (electron beams, EUV, lasers, synchrotron radiation, X-rays, gamma rays, ion beams). We are elucidating chemical reaction systems from the application of energy to materials by quantum beams, through chemical reactions to the discovery of functions, constructing new chemical reaction systems based on the knowledge obtained and it will be useful for the development of materials and processes. In materials and process development, we conduct research and development of nanofabricated materials and processes for EUV lithography, which is used in the manufacture of cutting-edge semiconductor devices. In order to achieve carbon neutrality, it is essential to reduce the power required for digital information processing, which will continue to increase exponentially in the future, and nanofabrication technology is a key technology for manufacturing high-performance devices.