In the future, the use of quantum beams in the ionizing radiation field, such as extreme ultraviolet lithography in semiconductor manufacturing and particle beam cancer therapy, is expected to expand greatly.
The Quantum Beam Materials Science Division uses state-of-the-art quantum beams (electron beams, extreme ultraviolet beams, lasers, synchrotron radiation, X-rays, gamma rays, and ion beams) to study chemical reactions and reaction fields induced in materials by quantum beams.
We are elucidating the chemical reaction system from the energy imparted to materials by quantum beams to the expression of functions through chemical reactions, and based on the obtained knowledge, we are constructing a "novel chemical reaction system" that will enable the production of next-generation high-performance semiconductors at the angstrom node.