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半導体大量生産におけるナノ化学への挑戦
凝縮相の極紫外線光化学
極限状態下のビーム誘起反応研究
ナノ粒子・コロイド溶液の放射線化学研究
量子ビーム誘起による有機・無機ナノ構造形成機構の解明と応用
機械学習による材料設計
現像プロセスの研究
メタルレジストの研究
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RESEARCH
Challenges of Nanochemistry in Mass Production of Semiconductors
Extreme Ultraviolet Photochemistry of Condensed Phases
Beam-induced Reaction Research Under Extreme Conditions
Radiation Chemistry Studies of Nanoparticles and Colloidal Solutions
Quantum Beam-induced Organic and Inorganic Nanostructure Formation Mechanisms and Applications
Materials Design by Machine Learning
Research on the Development Process
Metal Resist Research
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PUBLICATIONS
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PUBLICATIONS
Journals
Review Article
International Conference
Domestic Conference
books
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HOME
MEMBERS
Group Photos
RESEARCH
半導体大量生産におけるナノ化学への挑戦
凝縮相の極紫外線光化学
極限状態下のビーム誘起反応研究
ナノ粒子・コロイド溶液の放射線化学研究
量子ビーム誘起による有機・無機ナノ構造形成機構の解明と応用
機械学習による材料設計
現像プロセスの研究
メタルレジストの研究
PUBLICATIONS
Journals
Review Articles
International Conference
Domestic Conference
Books
Invited Lecture
Awards
GALLERY
LINKS
ACCESS
ENGLISH
RESEARCH
Challenges of Nanochemistry in Mass Production of Semiconductors
Extreme Ultraviolet Photochemistry of Condensed Phases
Beam-induced Reaction Research Under Extreme Conditions
Radiation Chemistry Studies of Nanoparticles and Colloidal Solutions
Quantum Beam-induced Organic and Inorganic Nanostructure Formation Mechanisms and Applications
Materials Design by Machine Learning
Research on the Development Process
Metal Resist Research
ACCESS
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